Field effect transistor and fabrication process thereof

ABSTRACT

Using a mask opening a gate region, an undoped GaAs layer is selectively etched with respect to an undoped Al 0.2 Ga 0.8 As layer by dry etching with introducing a mixture gas of a chloride gas containing only chlorine and a fluoride gas containing only fluorine (e.g. BCl 3 +SF 6  or so forth). By about 100% over-etching is performed for the undoped GaAs layer, etching (side etching) propagates in transverse direction of the undoped GaAs layer. With using the mask, a gate electrode of WSi is formed. Thus, a gap in a width of about 20 nm is formed by etching in the transverse direction on the drain side of the gate electrode. By this, a hetero junction FET having reduced fluctuation of characteristics of an FET, such as a threshold value, lower a rising voltage and higher breakdown characteristics.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates generally to a field effect transistor (FET) and a fabrication process thereof. More particularly, the invention relates to a hetero junction FET and a fabrication process thereof.

[0003] 2. Description of the Related Art

[0004] Conventionally, GaAs FETs have been widely employed as elements for high frequency. Particularly, in a high power element, in order to certainly achieve reduction of a source resistance and higher gate breakdown voltage(gate tolerance voltage), a multi-stage recessed structure has been employed. FIGS. 1A to 1D are sections showing a recess formation process of the conventional GaAs FET, illustrating the process steps in sequential order. As shown in FIG. 1A, a channel layer 2 consisted of an undoped InGaAs or an undoped GaAs, is formed on a GaAs layer 1. On the channel layer 2, an Si doped AlGaAs layer 3 is formed. On the AlGaAs layer 3, an Si doped GaAs layer 4 is formed. Also, a wide recess 6 is formed by patterning the GaAs layer 4 employing a mask 5.

[0005] Next, as shown in FIG. 1B, a mask 7 is formed with covering the upper surface and side surface of the GaAs layer 4 after patterning. Using the mask 7, an upper half of the AlGaAs layer 3 is patterned to form a recess 8 for a gate.

[0006] Subsequently, as shown in FIG. 1C, a gate electrode 9 is buried in the recess 8. Furthermore, as shown in FIG. 1D, after removing the mask 7, a source electrode 10 and a drain electrode 11 are selectively formed on the GaAs layer 4.

[0007] As set forth above, in a fabrication process of the conventional multi-stage recessed structure, the recesses are formed by patterning the masks per each stage and wet etching process with an etching liquid containing sulfuric acid as primary component.

[0008] However, in the fabrication process of the FET of the multi-stage recessed structure, exposure steps in number corresponding to number of recesses are required. On the other hand, since wet etching is performed every time of formation of the recess, fluctuation of etching can be caused to degrade uniformity and reproduction ability of FET characteristics (particularly threshold voltage).

[0009] Particularly, in FIG. 1B, a shape of the recess 8 formed by etching immediately before providing the gate, significantly influences for threshold value.

[0010] On the other hand, there has been proposed a recess forming technology by selective dry etching of the GaAs layer with taking the InGaAs layer or AlGaAs layer as an etching stopper (Japanese Unexamined Patent Publication No. Heisei 4-280640). However, the conventional recess forming process by the selective dry etching is primarily directed to realization of the threshold value with high uniformity and no consideration is given for improvement of the FET characteristics per se.

[0011] On the other hand, in “High Efficiency Power Module Using HEMT for PDC”, Preliminary Report of 1996 Institute of Electronics, Communication and Information, Electron-Science Meeting, C-422, there has been disclosed a multi-stage recessed InGaAS/AlGaAs HEMT, in which an etching stopper layer consisted of n⁻AlGaAs is provided between an n⁺GaAs layer and an n⁻GaAs layer to perform selective etching to form the recessed structure with good controllability and reproduction ability. On the other hand, in FIG. 1 of known publication, there has been disclosed a structure, in which a gate metal and a neighborhood semiconductor layer are not contacted.

[0012] In the above-identified known publication, there is no disclosure for a fabrication process of the HEMT and thus is not clear. Supposing from the structure, since mask for forming the gate metal is formed after formation of two stage recessed structure through at least twice of lithographic steps, at least three times of lithographic steps becomes necessary.

SUMMARY OF THE INVENTION

[0013] It is an object of the present invention to improve an FET characteristics by improving an electrode structure of an FET.

[0014] Another object of the present invention is to provide a fabrication process of an FET with lesser fluctuation of characteristics of the FET, such as a threshold value or so forth, with lower rising voltage, achieving a hetero junction FET structure having high breakdown voltage (tolerance voltage) characteristics with high uniformity and reproduction ability, and with high yield.

[0015] A further object of the present invention is to provide a fabrication process of the FET, in which a gate portion of a hetero junction FET of a multi-stage recessed structure having good characteristics, or an ohmic electrode having a lower contact resistance of the FET can be formed simply with high uniformity and reproduction ability.

[0016] A first aspect of the field effect transistor according to the present invention comprises: a hetero junction semiconductor crystal having at least a channel layer of InGaAs or GaAs, a first AlGaAs layer. a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer; and an ohmic electrode contacting with said second GaAs layer and said channel layer or with said second GaAs layer and said first AlGaAs layer doped with a donor.

[0017] Also, said field effect transistor may includes a gate electrode having a two stage recess structure, in which said first and second GaAs layers are removed in stepwise fashion in the vicinity of said gate electrode forming portion, said gate electrode having a gap between said first GaAs layer and said gate electrode on said first AlGaAs layer, whereby said gate electrode does not contact with said first GaAs layer.

[0018] A second aspect of the field effect transistor according to the present invention comprises: a hetero junction semiconductor crystal at least including a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer, said hetero junction semiconductor crystal having a two stage recess structure removed said first and second GaAs layers in stepwise fashion in the vicinity of a gate electrode forming portion; and a gate electrode having a gap on said first AlGaAs layer and between said first GaAs layer and said gate electrode, so as to not contact said gate electrode with said first GaAs layer, a gap between a drain region side of said gate electrode and said first GaAs layer being greater than said gap between the source region side of said gate electrode and said first GaAs layer.

[0019] A third aspect of the field effect transistor according to the present invention comprises: a hetero junction semiconductor crystal at least including a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an high concentration n-type second GaAs layer, said hetero junction semiconductor crystal having a two stage recess structure removed said first and second GaAs layers in stepwise fashion in the vicinity of a gate electrode forming portion; and a gate electrode having a gap on said first AlGaAs layer and between said first GaAs layer and said gate electrode, so as to not contact said gate electrode with said first GaAs layer, a gap between the source region side of said gate electrode and said first GaAs layer being greater than a gap between the drain region side of said gate electrode and said first GaAs layer.

[0020] A fourth aspect of the field effect transistor according to the present invention comprises: a hetero junction semiconductor crystal at least including a channel layer of InGaAs or GaAs, an AlGaAs layer, a layer of InAlAs or InAlGaAs and an n-type GaAs layer, said hetero junction semiconductor crystal having a two stage recess structure removed said n-type GaAs layer and a layer of InAlAs or InAlGsAs in the vicinity of a gate electrode; and a gate electrode provided on said AlGaAs layer, defining a gap between said gate electrode and said layer of InAlAs or InAlGaAs so as to not contact said gate electrode with said layer of InAlAs or InAlGaAs.

[0021] A distance of said gap between the drain region side of said gate electrode and the layer of InAlAs or InAlGaAs may be different from a distance of said gap defined between the source region side of said gate electrode and the layer of InAlAs or InAlGaAs.

[0022] A first aspect of the fabrication process of a field effect transistor according to the present invention comprises the steps of: forming a hetero junction semiconductor crystal having a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer; forming a two stage recess structure by selective etching of said first GaAs layer and said second GaAs layer with respect to said first AlGaAs layer and said second AlGaAs layer for removing said first and second GaAs layers in stepwise fashion in the vicinity of a gate electrode forming portion; performing etching in a transverse direction with respect to said first GaAs layer by performing excessive etching after reaching to said first AlGaAs layer in said selective etching with respect to said first GaAs layer; and forming a gate electrode on said first AlGaAs layer so as to define a gap between said first GaAs layer and said gate electrode, whereby said gate electrode does not contact with said first GaAs layer.

[0023] A second aspect of the fabrication process of a field effect transistor according to the present invention comprises the steps of: forming a hetero junction semiconductor crystal having a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer; selectively etching said first GaAs layer with respect to said first AlGaAs layer after said second GaAs layer and said second AlGaAs layer are removed using a mask which has an opening at an ohmic region; forming an ohmic electrode by deposition and lift off of ohmic metal and heat treatment for alloying so as to contact to at least said second GaAs layer and said channel layer or said second GaAs layer and said first AlGaAs layer doped with a donor.

[0024] A third aspect of the fabrication process of a field effect transistor employing a hetero junction semiconductor crystal, in which a GaAs layer is stacked on an AlGaAs layer, according to the present invention comprises the steps of: performing an anisotropic etching of said GaAs layer in an oblique direction from the upper side of one of regions of a source region and a drain region, by arranging a mask opening a gate electrode portion on the crystal; and forming a gate metal on said AlGaAs layer by deposition and lift off from the above in the perpendicular direction with respect to a substrate or an ion beam method.

[0025] A fourth aspect of the fabrication process of a field effect transistor employing a hetero junction semiconductor crystal, in which a GaAs layer is stacked on an AlGaAs layer, according to the present invention comprises the steps of: arranging a first mask on said semiconductor crystal and performing an anisotropic etching of said first mask in an oblique direction toward a drain region from the upper side of a source region using a second mask opening a gate electrode portion; etching said GaAs layer using said first mask; and forming a gate electrode by deposition of a gate metal from the above in the perpendicular direction with respect to a substrate and lift off or an ion beam method from the above in the perpendicular direction with respect to said substrate.

[0026] A fifth aspect of the fabrication process of a field effect transistor according to the present invention comprises the steps of: forming a hetero junction semiconductor crystal having a channel layer of InGaAs or GaAs, an AlGaAs layer, a layer of InAlAs or InAlGaAs and an n-type GaAs layer; forming a first stage recess structure removing a part of said n-type GaAs layer; forming a mask for use of pattering a second stage recess structure; selectively etching said layer of InAlAs or InAlGaAs on said AlGaAs layer employing an etchant having a composition of (hydrogen chloride):(water)=1:x(x<6); and propagating etching in transverse direction with respect to the layer of InAlAs or InAlGaAs by excessive etching after selective etching of said layer of InAlAs or InAlGaAs reaches to said AlGaAs layer.

[0027] With the construction of the FET according to the present invention, a contact portion of the ohmic electrode become wide to reduce a contact resistance. This invention is applicable not only for the two stage recessed structure but also for a normal FET.

[0028] On the other hand, with the structure of the present invention, the source resistance can be reduced and a gate breakdown voltage can be improved.

[0029] Furthermore, with the structure of the present invention, a resistance of the drain electrode can be lowered.

[0030] Also, according to the fabrication process of the present invention, a position of the gate electrode can be controlled between the source region and the drain region. Depending upon application of the FET, the position of the gate electrode or an interval between respective electrodes and the gate electrode can be controlled to adjust major characteristic parameter of the FET, such as a source resistance, a drain resistance, a gate breakdown voltage and so forth.

[0031] On the other hand, in the present invention, the ohmic electrode structure with reduced ohmic resistance can be applied. Also, by applying the structure, in which the position of the gate electrode is controlled between the source region and the drain region, the effect similar to those set forth above can be achieved.

[0032] In the present invention, in the step of performing isotropic selective etching of the GaAs layer with respect to the AlGaAs layer, etching propagates in transverse direction of the GaAs layer by over-etching after etching is reached to the AlGaAs layer. Furthermore, the etching length in the transverse direction can be easily controlled by an etching period to form the recess having a desired transverse etching length. By this, concentration of the electric field on the drain region side of the gate electrode can be reduced to permit improvement of the breakdown voltage characteristics. FIG. 2 is an illustration showing a controllability of selective etching with taking an over-etching ratio in the horizontal axis and a side etching amount in the vertical axis. FIG. 2 shows a dependency of the side etching length relative to the over-etching ratio. For example, the side etching of 20 nm can be performed by 100% of over-etching.

[0033] On the other hand, by contacting the ohmic electrode with at least one of the high concentration n-type GaAs cap layer and InGaAs channel layer or the GaAs channel layer, the contact area of the two-dimensional electron transit layer and the ohmic region can be large to reduce contact resistance. Accordingly, lower rising voltage can be realized.

[0034] Furthermore, the compound semiconductor containing In, such as InAlGaAs can be etched by hydrochloric acid. On the other hand, since AlGaAs layer is not solved by hydrochloric acid, by employing the hetero junction of the InAlGaAs layer and the AlGaAs layer as the recessed region forming layer, the recessed structure can be formed with good controllability similarly to the step of isotropic selective etching of the GaAs layer and the AlGaAs layer as set forth above.

BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The present invention will be understood more fully from the detailed description given herebelow and from the accompanying drawings of the preferred embodiment of the present invention, which, however, should not be taken to be limitative to the invention, but are for explanation and understanding only.

[0036] In the drawings:

[0037]FIGS. 1A to 1D are sections showing the conventional fabrication process of a field effect transistor, illustrating process steps in sequential order;

[0038]FIG. 2 is a graph showing a controllability of selective etching of the fabrication process according to the present invention;

[0039]FIGS. 3A to 3F are sections of the first embodiment of a field effect transistor, showing process steps in fabrication of the first embodiment of the field effect transistor illustrated in sequential order;

[0040]FIGS. 4A to 4F are sections of the second embodiment of a field effect transistor, showing process steps in fabrication of the second embodiment of the field effect transistor illustrated in sequential order;

[0041]FIGS. 5A to 5F are sections of the third embodiment of a field effect transistor, showing process steps in fabrication of the third embodiment of the field effect transistor illustrated in sequential order;

[0042]FIGS. 6A to 6E are sections of the fourth embodiment of a field effect transistor, showing process steps in fabrication of the fourth embodiment of the field effect transistor illustrated in sequential order;

[0043]FIG. 7 is section of the fifth embodiment of a field effect transistor according to the present invention;

[0044]FIGS. 8A to 8E are sections of the sixth embodiment of a field effect transistor, showing process steps in fabrication of the sixth embodiment of the field effect transistor illustrated in sequential order;

[0045]FIGS. 9A to 9E are sections of the seventh embodiment of a field effect transistor, showing process steps in fabrication of the seventh embodiment of the field effect transistor illustrated in sequential order; and

[0046]FIGS. 10A to 10F are sections of the eighth embodiment of a field effect transistor, showing process steps in fabrication of the eighth embodiment of the field effect transistor illustrated in sequential order.

DESCRIPTION OF THE PREFERRED EMBODIMENT

[0047] The present invention will be discussed hereinafter in detail in terms of the preferred embodiment of the present invention with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be obvious, however, to those skilled in the art that the present invention may be practiced without these specific details. In other instance, well-known structures are not shown in detail in order to avoid unnecessary obscure the present invention.

[0048] First Embodiment

[0049]FIGS. 3A to 3F are sections showing a fabrication process of the first embodiment of a hetero junction FET according to the present invention, illustrated in sequential order of various process steps.

[0050] At first, as shown in FIG. 3A, on the surface of a semi-insulative GaAs substrate 101, an undoped GaAs layer 102 (as a buffer layer) in a layer thickness of about 500 nm, an undoped In_(0.2)Ga_(0.8)As channel layer 103 in a layer thickness of 14 nm, an undoped Al_(0.2)Ga_(0.8)As layer 104 in a layer thickness of 2 nm, an Al_(0.2)Ga_(0.8)As layer 105 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 9 nm, an undoped Al_(0.2)Ga_(0.8)As layer 106 in a layer thickness of 25 nm, an undoped GaAs layer 107 in a layer thickness of 10 nm, an undoped Al_(0.2)Ga_(0.8)As etching stopper layer 108 in a layer thickness of 6 nm, and an n-type GaAs layer 109 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method. An epitaxial wafer therefor may be fabricated by way of molecular beam epitaxy (MBE) method or a metal organic vapor phase epitaxy (MOVPE) method.

[0051] Next, as shown in FIG. 313, a mask 110 opening a gate region is formed on the GaAs layer 109. Then, employing an ECR etching device or an RIE device, a mixture gas of a chloride gas containing only chlorine and a fluoride gas containing only fluorine, as a halogen element (e.g. BCl₃+SF₆ and the like) is introduced into the ECR etching device or the RIE device to perform dry etching for removing the n-type GaAs layer 109 in the layer thickness of 100 nm is selectively etched with respect to the Al_(0.2)Ga_(0.8)As etching stopper layer 108 to form a wide recess 111.

[0052] Next, as shown in FIG. 3C, after removing the Al_(0.2)Ga_(0.8)As etching stopper layer 108 and the mask 110 at a portion exposed to the surface, the undoped GaAs layer 107 in the layer thickness of 10 nm is selectively etched with respect to the Al_(0.2)Ga_(0.8)As layer 106 using the mask 112 having an opening at the gate region which has a narrower opening width than the mask 110, to form a gate opening portion 113. At this time, as shown in FIG. 3D, by over-etching the undoped GaAs layer 107, side etching is progressed in the transverse direction of the undoped GaAs layer 107.

[0053] Next, as shown in FIG. 3E, by burying WSi in the gate opening portion 113 using the mask 112, a gate electrode 114 is formed.

[0054] In this case, by side etching, a gap 115 is formed between the gate electrode 114 and the GaAs layer 107 on the sides of the source and drain. For example, when 100% over-etching is performed by using a mixture gas of BCl₃+SF₆, the gap 115 of about 20 nm is formed. The width of the gap 115 (namely the gap between the gate electrode 114 and the GaAs layer 107) can be controlled by a ratio of the over-etching.

[0055] Next, as shown in FIG. 3F, the mask 112 is removed. After formation of a mask for the portion unnecessary for formation of the electrode, an AuGe layer is deposited over the entire surface. Then, the mask is removed to form an electrode pattern of AuGe by lift off. Furthermore, for alloying, the AuGe electrode pattern is subject heat treatment at 400° C. for one minutes to form a source electrode 116 and a drain electrode 117 as ohmic electrode.

[0056] As a result of fabrication of the shown embodiment of the hetero junction under the foregoing fabrication condition, the recessed structure as designed can be fabricated with high controllability and reproduction ability by employing selective dry etching in formation of the recess. Therefore, a standard deviation of the threshold voltage could be suppressed to be small, such as 20 mV. Furthermore, since the gap is formed on the source and the drain region sides of the gate electrode, high breakdown voltage, such as 20V can be obtained as the gate breakdown voltage. On the other hand, by performing side etching for the GaAs layer 107, the mask 112 used for etching can be used for formation of the gate electrode as is, number of process steps to perform lithography can be reduced to contribute for reduction of process steps, improvement of mass production ability and for improvement of yield.

[0057] Second Embodiment

[0058]FIGS. 4A to 4F are sections showing a fabrication process of the second embodiment of a hetero junction FET according to the present invention, illustrated in sequential order of various process steps.

[0059] At first, as shown in FIG. 4A, on the surface of a semi-insulative GaAs substrate 201, an undoped GaAs layer 202 (as a buffer layer) in a layer thickness of about 500 nm, an Al_(0.2)Ga_(0.8)As layer 203 doped with 4×10¹⁸ cm⁻³ of Si in a layer thickness of 4 nm, an undoped In_(0.2)Ga_(0.8)As layer 204 in a layer thickness of 2 nm, an undoped Al_(0.2)Ga_(0.8)As layer 206 in a layer thickness of 14 nm, an Al_(0.2)Ga_(0.8)As layer 207 doped with 4×10¹⁸ cm⁻³ of Si in a thickness of 9 nm, an undoped Al_(0.2)Ga_(0.8)As layer 208 in a layer thickness of 25 nm, an undoped GaAs layer 209 in a layer thickness of 10 nm, an undoped Al_(0.2)Ga_(0.8)As etching stopper layer 210 in a layer thickness of 6 nm and an n-type GaAs layer 211 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method. An epitaxial wafer therefor may be fabricated by way of molecular beam epitaxy (MBE) method or a metal organic vapor phase epitaxy (MOVPE) method.

[0060] Next, as shown in FIG. 4B, a mask 212 opening a gate region is formed on the n-type GaAs layer 211. Then, employing an ECR etching device or an RIE device, a mixture gas of a chloride gas containing only chlorine and a fluoride gas containing only fluorine, as a halogen element (e.g. BCl₃+SF₆ and the like) is introduced into the ECR etching device or the RIE device to perform dry etching for selectively etching the n-type GaAs layer 211 in the layer thickness of 100 nm with respect to the Al_(0.2)Ga_(0.8)As etching stopper layer 209 to form a gate opening portion 213.

[0061] Next, as shown in FIG. 4C, after removing the Al_(0.2)Ga_(0.8)As etching stopper layer 210 and the mask 212 at a portion exposed to the surface, the undoped GaAs layer 209 in the layer thickness of 10 nm is selectively etched with respect to the Al_(0.2)Ga_(0.8)As layer 208, to form a gate opening portion 215, by using a mask 214 opening the gate region which has narrower opening width than the mask 212.

[0062] At this time, as shown in FIG. 4D, by over-etching the undoped GaAs layer 209, etching (side etching) is progressed in the transverse direction of the undoped GaAs layer 209. Next, WSi is buried in the gate opening portion 215 with the mask 214 to form a gate electrode 216.

[0063] Next, as shown in FIG. 4E, by side etching, a gap 217 is formed on the source and drain sides of the gate electrode 216. For example, when 100% over-etching is performed by using a mixture gas of BCl₃+SF₆, the gap 217 of about 20 nm is formed. The width of the gap 217 (namely the gap between the gate electrode 216 and the Al_(0.2)Ga_(0.8)As layer 208) can be controlled by a ratio of the over-etching.

[0064] Next, as shown in FIG. 4F, the mask 214 is removed. Thereafter, by deposition and lift off method and alloying method of AuGe (e.g. 400° C. for 1 minutes), a source electrode 218 and a drain electrode 219 are formed as ohmic electrodes. By this, element is completed.

[0065] As a result of fabrication of the shown embodiment of the hetero junction under the foregoing fabrication condition, a standard deviation of the threshold voltage could be suppressed to be small, such as 20 mV. Furthermore, since the gap is formed on the drain region side of the gate electrode, high breakdown voltage, such as 18V can be obtained as the gate breakdown voltage. In addition, by employment of a double dope structure, a maximum drain current is 700 mA/mm which is higher than the element of the single dope structure in the extent of about 300 mA/mm.

[0066] Third Embodiment

[0067]FIGS. 5A to 5F are sections showing a fabrication process of the third embodiment of a hetero junction FET according to the present invention, illustrated in sequential order of various process steps.

[0068] At first, as shown in FIG. 5A, on the surface of a semi-insulative GaAs substrate 301, an undoped GaAs layer 302 (as a buffer layer) in a layer thickness of about 500 nm, an undoped In_(0.2)Ga_(0.8)As channel layer 303 in a layer thickness of 14 nm, an undoped Al_(0.2)Ga_(0.8)As leyer 304 in a layer thickness of 2 nm, an Al_(0.2)Ga_(0.8)As layer 305 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 9 nm, an undoped Al_(0.2)Ga_(0.8)As layer 306 in a layer thickness of 25 nm, an undoped GaAs layer 307 in a layer thickness of 10 nm, an undoped Al_(0.2)Ga_(0.8)As etching stopper layer 308 in a layer thickness of 6 nm, and an n-type GaAs layer 309 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method.

[0069] Next, as shown in FIG. 5B, a mask 310 opening a gate region is formed on the GaAs layer 309. Then, employing this mask 310, the n-type GaAs layer 309 is selectively etched with respect to the Al_(0.2)Ga_(0.8)As etching stopper layer 308 by dry etching to form a wide recess 311 forming the gate and an opening portion 312 to be drain and source electrode regions.

[0070] Next, as shown in FIG. 5C, after removing the Al_(0.2)Ga_(0.8)As etching stopper layer 308 and the mask 310 at a portion exposed to the surface, the undoped GaAs layer 307 in the layer thickness of 10 nm is selectively etched with respect to the Al_(0.2)Ga_(0.8)As layer 306 by dry etching employing a mask 313 opening a gate region and an ohmic region, to form a gate opening portion 314 and an ohmic opening portion 315.

[0071] At this time, as shown in FIG. 5D, by performing excessive etching for the undoped GaAs layer 307, side etching is progressed in the transverse direction of the undoped GaAs layer 307 in the gate opening portion 314 and the ohmic opening portion 315.

[0072] Next, as shown in FIG. 5E, by burying WSi in the gate opening portion using a mask 316 having opening in the gate portion, a gate electrode 317 is formed. After the mask 316 is removed, a gap 318 is formed on the drain side of the gate electrode 317. For example, when 100% over-etching is performed by using a mixture gas of BCl₃+SF₆, the gap 317 of about 20 nm is formed.

[0073] Next, as shown in FIG. 5F, after removal of the Al_(0.2)Ga_(0.8)As layer 306 of the ohmic opening portion, deposition and lift off method and alloying (400° C. for 1 minutes) method of AlGe are performed employing a mask 319 which has a larger opening area than the ohmic opening portion 315 by 10% to form a source electrode 320 and a drain electrode 321 as ohmic electrode. At this time, an ohmic metal is sintered in a depth of about 25 nm by alloying and contacts with the undoped In_(0.2)Ga_(0.8)As channel layer 303. Subsequently, the mask 319 is removed to complete the element.

[0074] As a result of fabrication of the shown embodiment of the hetero junction FET under the foregoing fabrication condition, a standard deviation of the threshold voltage could be suppressed to be small, such as 20 mV, since selective dry etching is used for forming the recess. Furthermore, since the gap is formed on the drain region side of the gate electrode, high breakdown voltage, such as 20 V can be obtained as the gate breakdown voltage. Also, since the ohmic electrode contact to at least of the n-type GaAs layer in the layer thickness of 100 nm and the undoped In_(0.2)Ga_(0.8)As channel layer, a contact resistance can be reduced, and thus 2.1 Ω·mm of ON resistance is achieved. This is lower than ON resistance of the conventional element, in which the ohmic electrode is in contact with only n-type GaAs layer, in the extent of about 0.4 Ω·mm.

[0075] Fourth Embodiment

[0076]FIGS. 6A to 6E are sections showing a fabrication process of the sixth embodiment of the field effect transistor according to the present invention. In the shown embodiment, the process steps up to the step shown in FIG. 6B are the same as those in the third embodiment as illustrated in FIG. 5B. In the shown embodiment, as shown in FIG. 6C, the undoped GaAs layer 407 is selectively etched to form a gate opening portion 414 and an ohmic opening portion 415.

[0077] Next, as shown in FIG. 6D, employing a mask 416 opened the ohmic portion 415, the undoped Al_(0.2)Ga_(0.8)As layer 406, the Al_(0.2)Ga_(0.8)As layer 405 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 9 nm and the undoped Al_(0.2)Ga_(0.8)As layer 404 in the layer thickness of 2 nm are removed by an etchant containing sulfuric acid as a primary component.

[0078] Next, as shown in FIG. 6E, using a mask 417 having an ohmic opening portion having greater opening area than that of the gate opening portion 414 and the ohmic opening portion 415, in a extent of approximately 10%, a gate electrode 418, a source electrode 419 and a drain electrode 420 are formed by deposition and lift off of Al. Thereafter, the mask 417 is removed to form a gap 421 and complete the element.

[0079] Even in the shown embodiment, the characteristics comparable with the field effect transistor discussed in terms of the structure of the third embodiment.

[0080] Fifth Embodiment

[0081]FIG. 7 is a section showing one process step of a fabrication process of the fifth embodiment of the field effect transistor according to the present invention. In the shown embodiment, on the surface of a semi-insulative GaAs substrate 501, an undoped GaAs layer 502 (as a buffer layer) in a layer thickness of about 500 nm, an Al_(0.2)Ga_(0.8)As layer 503 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 4 nm, an undoped Al_(0.2)Ga_(0.8)As 504 in a layer thickness of 2 nm, an undoped In_(0.2)Ga_(0.8)As channel layer 505 in a layer thickness of 14 nm, an undoped Al_(0.2)Ga_(0.8)As layer 506 in a layer thickness of 2 nm, an Al_(0.2)Ga_(0.8)As layer 507 doped with 4×10⁻¹⁸ cm⁻³ of Si, which has a layer thickness of 9 nm, an undoped Al_(0.2)Ga_(0.8)As layer 508 in a layer thickness of 25 nm, an undoped GaAs layer 509 in a layer thickness of 10 nm, an undoped Al_(0.2)Ga_(0.8)As etching stopper layer 510 in a layer thickness of 6 nm and an n-type GaAs layer 511 (double doped double hetero structure) doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method.

[0082] According to the shown embodiment, a standard deviation of the threshold voltage could be suppressed to be small, such as 20 mV, since selective dry etching is used for forming the recess. Furthermore, since the gap is formed on the drain region side of the gate electrode, high breakdown voltage, such as 18 V can be obtained as the gate breakdown voltage. In addition, by employment of a double dope structure, a maximum drain current is 700 mA/mm which is higher than the element of the single dope structure in the extent of about 300 mA/mm. Also, since the ohmic electrode contact to at least of the n-type GaAs layer in the layer thickness of 100 nm and the undoped In_(0.2)Ga_(0.8)As channel layer, a contact resistance can be reduced, and thus 21 Ω·mm of ON resistance is achieved. This is lower than ON resistance of the conventional element, in which the ohmic electrode is in contact with only n-type GaAs layer in the layer thickness of 100 nm, in the extent of about 0.4 Ω·mm.

[0083] Sixth Embodiment

[0084]FIGS. 8A to 8F are sections showing a fabrication process of the sixth embodiment of a hetero junction HJFET according to the present invention, illustrated in sequential order of various process steps.

[0085] At first, as shown in FIG. 8A, on the surface of a semi-insulative GaAs substrate 601, an undoped GaAs layer 602 (as a buffer Layer) in a layer thickness of about 500 nm, an undoped In_(0.2)Ga_(0.8)As channel layer 603 in a layer thickness of 14 nm, an undoped Al_(0.2)Ga_(0.8)As layer 604 in a layer thickness of 2 nm, an Al_(0.2)Ga_(0.8)As layer 605 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of layer thickness of 9 nm,, an undoped Al_(0.2)Ga_(0.8)As layer 606 in a layer thickness of 25 nm, an undoped GaAs layer 607 in a layer thickness of 10 nm, an undoped Al_(0.2)Ga_(0.8)As etching stopper layer 608 in a layer thickness of 6 nm, and an n-type GaAs layer 609 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method.

[0086] Next, as shown in FIG. 8B, employing a mask 610, the n-type GaAs layer 609 in the layer thickness of 100 nm is selectively etched with respect to the undoped Al_(0.2)Ga_(0.8)As etching stopper layer 608 by dry etching to form a wide recess 611.

[0087] Next, as shown in FIG. 8C, the Al_(0.2)Ga_(0.8)As etching stopper layer 608 and the mask 610 are removed. Then, by arranging a mask 612 opening in the gate electrode portion, which has a layer thickness of about 400 nm, the semi-insulative GaAs substrate 601 is tilted at an angle of about 45°. An isotropic etching is performed for the undoped GaAs layer 607 in the layer thickness of 10 nm in the oblique direction from upper side of the source region toward the drain region to form a gate electrode opening portion 613. At this time, the gate electrode opening portion 613 is offset toward the drain region in a magnitude of about 400 nm from the gate opening portion.

[0088] Next, as shown in FIG. 8D, a gate electrode 614 of Al is formed by deposition from the above in the perpendicular direction with respect to the substrate 601 and lift off, or ion beam method. At this time, a recess of about 400 nm is formed on the side of the drain region of the gate electrode 614.

[0089] Next, as shown in FIG. 8E, by performing deposition and lift off method and alloying (400° C. for 1 minutes) method of ohmic metal of AuGe, a source electrode 615 and a drain electrode 616 are formed.

[0090] In the shown embodiment, for employing an isotropic etching by tilting the GaAs substrate upon forming of the recess formation, the gap is formed on the side of the drain region of the gate electrode. Thus, a high gate breakdown voltage of about 18V can be obtained.

[0091] On the other hand, in the shown embodiment, the mask 612 opening the gate electrode portion having a layer thickness of 400 nm is arranged in the vicinity of the source region. The gate electrode is offset toward the source electrode to reduce a source resistance.

[0092] Seventh Embodiment

[0093]FIGS. 9A to 9E are sections showing a fabrication process of the seventh embodiment of a hetero junction FET according to the present invention, illustrated in sequential order of various process steps.

[0094] At first, as shown in FIG. 9A, on the surface of a semi-insulative GaAs substrate 701, an undoped GaAs layer 702 (as a buffer layer) in a layer thickness of about 500 nm, an undoped In_(0.2)Ga_(0.8)As layer 703 in a layer thickness of 14 nm, an undoped Al_(0.2)Ga_(0.8)As layer 704 in a layer thickness of 2 nm, an Al_(0.2)Ga_(0.8)As layer 705 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 9 nm, an undoped Al_(0.2)Ga_(0.8)As layer 706 in a layer thickness of 25 nm, an undoped GaAs layer 707 in a layer thickness of 10 nm, an undoped Al_(0.2)Ga_(0.8)As etching stopper layer 708 in a layer thickness of 6 nm, and an n-type GaAs layer 709 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method. The epitaxial wafer can be easily formed by MBE method or MOVPE method.

[0095] Next, as shown in FIG. 9B, employing a mask 710, the n-type GaAs layer 709 is selectively etched with respect to the undoped Al_(0.2)Ga_(0.8)As etching stopper layer 708 by dry etching to form a wide recess 711.

[0096] Next, as shown in FIG. 9C, after removing the undoped Al_(0.2)Ga_(0.8)As etching stopper layer 708, an SiO₂ layer 712 in a layer thickness of about 400 nm is arranged. Subsequently, employing a mask 713 which has an opening portion located at intermediate position of the gate region and the source region, the semi-insulative GaAs substrate 701 is titled in an angle of 45° The SiO₂ layer 712 in a layer thickness of about 400 nm is etched by anisotropic etching in an oblique direction from the upper side of the source region toward the drain region.

[0097] Next, employing the SiO₂ layer 712, the undoped GaAs layer 707 in the layer thickness of 10 nm is selectively etched with respect to the undoped Al_(0.2)Ga_(0.8)As layer 706 in the layer thickness of 25 nm by dry etching, to form a gate opening portion 714.

[0098] At this time, as shown in FIGS. 9C and 9D, by over-etching of the undoped GaAs layer 707, etching (side etching) is progressed in the transverse direction of the undoped GaAs layer 707. For example, when 100% over-etching is performed by employing a mixture gas of BCl₃+SF₆, side etching amount is in the extent of about 20 nm.

[0099] Next, as shown in FIG. 9D, through the opening of the SiO₂ layer 712, a gate electrode 715 of Al is formed on the undoped Al_(0.2)Ga_(0.8)As layer 706 by deposition and lift off method from the above in the perpendicular direction with respect to the Gaps substrate 701, and ion beam method.

[0100] Next, as shown in FIG. 9E, after removal of the SiO₂ layer 712, deposition and lift off method and alloying (400° C. for 1 minutes) method of AuGe are performed to form a source electrode 716 and a drain electrode 717 as ohmic electrode.

[0101] In the shown embodiment, since selective dry etching is employed in formation of the recess, the standard deviation of the threshold voltage can be suppressed as 20 mV. Furthermore, since the gate electrode is offset toward the source region side, a high gate breakdown voltage as 20V can be obtained in conjunction with 0.4 Ω·mm of source resistance. Also, the two stage recess offsetting gate structure FET can be formed through lithographic process one step less than the conventional method.

[0102] Eighth Embodiment

[0103]FIGS. 10A to 10F are sections showing a fabrication process of the eighth embodiment of a hetero junction FET according to the present invention, illustrated in sequential order of various process steps.

[0104] At first, as shown in FIG. 10A, on the surface of a semi-insulative GaAs substrate 801 in a diameter of 3 inches, an undoped GaAs layer 802 (as a buffer layer) in a layer thickness of about 500 nm, an Al_(0.2)Ga_(0.8)As layer 803 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 4 nm, an undoped Al_(0.2)Ga_(0.8)As layer 804 in a layer thickness of 2 nm, an undoped In_(0.2)Ga_(0.8)As channel layer 805 in a layer thickness of 14 nm, an undoped Al_(0.2)Ga_(0.8)As layer 806 in a layer thickness of 2 nm, an Al_(0.2)Ga_(0.8)As layer 807 doped with 4×10¹⁸ cm⁻³, which has a layer thickness of 9 nm, an undoped Al_(0.2)Ga_(0.8)As layer 808 in a layer thickness of 20 nm, an In_(0.5)Ga_(0.5)As layer 809 in a layer thickness of 15 nm and an n-type GaAs layer 811 doped with 4×10¹⁸ cm⁻³ of Si, which has a layer thickness of 100 nm are formed in sequential order by way of epitaxial growth method. The epitaxial well can be easily fabricated by the MBE method or the MOVPE method.

[0105] Next, as shown in FIG. 10B, a wide recess structure is formed by removing n-type GaAs layer 810 employing a mask 811.

[0106] Then, as shown in FIG. 10C, by arranging a mask 812, a narrow recess is formed by employing a choleric acid type etchant. The etchant employed herein is a selective etchant which resolves the In_(0.5)Ga_(0.5)As layer 809 but does not resolve the Al_(0.2)Ga_(0.8)As layer 808 below the In_(0.5)Ga_(0.5)As layer 809. Chloric acid is prepared by solving hydrogen chloride in water and the etchant may solve a compound semiconductor containing In. As a result of study, in case of an etchant having a composition of (hydro chloride):(water)=1:x (x<6), good selectivity and practically acceptable etching speed can be obtained. Here, an etchant prepared by mixing chloric acid and distilled water in a ratio of 1:1.

[0107] It should be noted that in place of In_(0.5)Ga_(0.5)As layer 809, an InAlGaAs layer may be employed.

[0108] Here, as shown in FIG. 10D, in etching, after removal of In_(0.5)Al_(0.5)As layer 809 under the opening portion of the mask 812, by performing excessive etching, side etching is progressed in the transverse direction of the undoped In_(0.5)Al_(0.5)As layer 809 in the gate opening portion 813.

[0109] Next, as shown in FIG. 10E, a gate electrode 814 of WSi is formed employing the mask 812. At this time, a gap 815 is formed by side etching on the drain side of the gate electrode 814. For example, in case that 100% over-etching is effected, the gap 815 in a width of about 15 nm is formed.

[0110] Then, as shown in FIG. 10F, AuGe is deposited as ohmic metal. After lift off, heat treatment for alloying is performed to form a source electrode 816 and a drain electrode 817.

[0111] In the shown embodiment, since selective dry etching is employed in formation of the recess, the standard deviation of the threshold voltage can be suppressed as 30 mV. Furthermore, since the gap is formed on the drain region side of the gate electrode, a high gate breakdown voltage as 20V can be obtained.

[0112] Also, the eighth embodiment shown in FIGS. 10A to 10F has a double dope step so that the FET thus fabricated has a double hetero structure. On the other hand, a single hetero structure may also be fabricated by the shown embodiment, similarly. A maximum drain current of the double hetero structure FET is 600 mA/mm and thus is suitable for high power element. On the other hand, the maximum drain current of the single hetero structure is about 300 mA/mm. However, the single hetero structure has a high mutual conductance at a specific bias point and thus is suitable for low noise amplifier.

[0113] While an example of a typically employed InGaAs channel layer having In content of about 0.2 atomic % formed on the GaAs substrate is dexcribed, similar result can be obtained even by replacing it with GaAs channel layer.

[0114] On the other hand, a hetero junction FET fabricated on an InP substrate, constituted by substituting AlGaAs layer with In_(0.5)Al_(0.5)As layer and substituting In_(0.2)Ga_(0.8)As layer with In_(0.5)Ga_(00.5)As layer, can obtain similar effect. In this case, it may be possible to employ tartaric acid etchant for InP hetero junction FET in place of dry etching method introducing a mixture gas of chloride gas containing only chlorine and fluoride gas containing only fluorine (e.g. BCl₃+SF₆) as halogen element, into the ECR etching device or the RIE device employed in the GaAs type hetero junction FET.

[0115] As set forth above, in the field effect transistor and its fabrication process, the GaAs layer is selectively etched isotropically. Therefore, a fluctuation of the characteristics of the element can be smaller than that of the method depending upon the etching period. Furthermore, good reproduction ability in fabrication of the FET can be attained.

[0116] Also, etching of the GaAs layer, the InAlAs layer or the InAlGaAs layer in the transverse direction can be performed simultaneously, and further, the length of etching can be easily controlled. By this, the recess can be formed on both sides of the gate electrode to permit improvement of the breakdown voltage. Also, number of lithographic processes upon formation of the gate can be reduced, thereby being superior in mass production ability and high yield.

[0117] On the other hand, by performing an isotropic etching of the GaAs layer or the gate electrode opening mask, in oblique direction toward the drain electrode from the above of the source electrode, a width of the recess between the gate electrode and the drain electrode can be greater than the width of the recess between the gate electrode and the source electrode. Thus, in order to lower the source resistance, it is effective in lowering of a rising voltage for reduction of the source resistance.

[0118] On the other hand, by contacting the ohmic electrode to at least one of high concentration n-type GaAs cap layer and InGaAs channel layer or GaAs channel layer, a contact resistance can be made smaller and thus is effective for lowering rising voltage. The low rising voltage is effective for improvement of output in low voltage operation and efficiency characteristics. Thus, the field effect transistor of the present invention is suitable for high power element to be employed in a transmission means of a mobile communication terminal (such as a potable phone and so forth).

[0119] Although the present invention has been illustrated and described with respect to exemplary embodiment thereof, it should be understood by those skilled in the art that the foregoing and various other changes, omissions and additions may be made therein and thereto, without departing from the spirit and scope of the present invention. Therefore, the present invention should not be understood as limited to the specific embodiment set out above but to include all possible embodiments which can be embodies within a scope encompassed and equivalents thereof with respect to the feature set out in the appended claims. 

What is claimed is:
 1. A field effect transistor comprising: a hetero junction semiconductor crystal having at least a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer; and an ohmic electrode contacting with said second GaAs layer and said channel layer or with said second GaAs layer and said first AlGaAs layer doped with a donor.
 2. A field effect transistor as set forth in claim 1 , which includes a gate electrode having a two stage recess structure, in which said first and second GaAs layers are removed in stepwise fashion in the vicinity of said gate electrode forming portion, said gate electrode having a gap between said first GaAs layer and said gate electrode on said first AlGaAs layer, whereby said gate electrode does not contact with said first GaAs layer.
 3. A field effect transistor comprising: a hetero junction semiconductor crystal at least including a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer, said hetero junction semiconductor crystal having a two stage recess structure removed said first and second GaAs layers in stepwise fashion in the vicinity of a gate electrode forming portion; and a gate electrode having a gap on said first AlGaAs layer and between said first GaAs layer and said gate electrode, so as to not contact said gate electrode with said first GaAs layer, a gap between a drain region side of said gate electrode and said first GaAs layer being greater than said gap between the source region side of said gate electrode and said first GaAs layer.
 4. A field effect transistor comprising: a hetero junction semiconductor crystal at least including a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an high concentration n-type second GaAs layer, said hetero junction semiconductor crystal having a two stage recess structure removed said first and second GaAs layers in stepwise fashion in the vicinity of a gate electrode forming portion; and a gate electrode having a gap on said first AlGaAs layer and between said first GaAs layer and said gate electrode, so as to not contact said gate electrode with said first GaAs layer, a gap between the source region side of said gate electrode and said first GaAs layer being greater than a gap between the drain region side of said gate electrode and said first GaAs layer.
 5. A field effect transistor comprising: a hetero junction semiconductor crystal at least including a channel layer of InGaAs or GaAs, an AlGaAs layer, a layer of InAlAs or InAlGaAs and an n-type GaAs layer, said hetero junction semiconductor crystal having a two stage recess structure removed said n-type GaAs layer and a layer of InAlAs or InAlGsAs in the vicinity of a gate electrode; and a gate electrode provided on said AlGaAs layer, defining a gap between said gate electrode and said layer of InAlAs or InAlGaAs so as to not contact said gate electrode with said layer of InAlAs or InAlGaAs.
 6. A field effect transistor as set forth in claim 5 , wherein a distance of said gap between the drain region side of said gate electrode and the layer of InAlAs or InAlGaAs is different from a distance of said gap defined between the source region side of said gate electrode and the layer of InAlAs or InAlGaAs.
 7. A fabrication process of a field effect transistor comprising the steps of: forming a hetero junction semiconductor crystal having a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer; forming a two stage recess structure by selective etching of said first GaAs layer and said second GaAs layer with respect to said first AlGaAs layer and said second AlGaAs layer for removing said first and second GaAs layers in stepwise fashion in the vicinity of a gate electrode forming portion; performing etching in a transverse direction with respect to said first GaAs layer by performing excessive etching after reaching to said first AlGaAs layer in said selective etching with respect to said first GaAs layer; and forming a gate electrode on said first AlGaAs layer so as to define a gap between said first GaAs layer and said gate electrode, whereby said gate electrode does not contact with said first GaAs layer.
 8. A fabrication process of a field effect transistor comprising the steps of: forming a hetero junction semiconductor crystal having a channel layer of InGaAs or GaAs, a first AlGaAs layer, a first GaAs layer, a second AlGaAs layer and an n-type second GaAs layer; selectively etching said first GaAs layer with respect to said first AlGaAs layer after said second GaAs layer and said second AlGaAs layer are removed using a mask which has an opening at an ohmic region; forming an ohmic electrode by deposition and lift off of ohmic metal and heat treatment for alloying so as to contact to at least said second GaAs layer and said channel layer or said second GaAs layer and said first AlGaAs layer doped with a donor.
 9. A fabrication process of a field effect transistor employing a hetero junction semiconductor crystal, in which a GaAs layer is stacked on an AlGaAs layer, comprising the steps of: performing an anisotropic etching of said GaAs layer in an oblique direction from the upper side of one of regions of a source region and a drain region, by arranging a mask opening a gate electrode portion on the crystal; and forming a gate metal on said AlGaAs layer by deposition and lift off from the above in the perpendicular direction with respect to a substrate or an ion beam method.
 10. A fabrication process of a field effect transistor employing a hetero junction semiconductor crystal, in which a GaAs layer is stacked on an AlGaAs layer, comprising the steps of: arranging a first mask on said semiconductor crystal and performing an anisotropic etching of said first mask in an oblique direction toward a drain region from the upper side of a source region using a second mask opening a gate electrode portion; etching said GaAs layer using said first mask; and forming a gate electrode by deposition of a gate metal from the above in the perpendicular direction with respect to a substrate and lift off or an ion beam method from the above in the perpendicular direction with respect to said substrate.
 11. A fabrication process of a field effect transistor comprising the steps of: forming a hetero junction semiconductor crystal having a channel layer of InGaAs or GaAs, an AlGaAs layer, a layer of InAlAs or InAlGaAs and an n-type GaAs layer; forming a first stage recess structure removing a part of said n-type GaAs layer; forming a mask for use of pattering a second stage recess structure; selectively etching said layer of InAlAs or InAlGaAs on said AlGaAs layer employing an etchant having a composition of (hydrogen chloride):(water)=1:x (x<6); and propagating etching in transverse direction with respect to the layer of InAlAs or InAlGaAs by excessive etching after selective etching of said layer of InAlAs or InAlGaAs reaches to said AlGaAs layer. 